Impurity and Micro Area Analysis in Secondary Ion Mass Spectrometry.
نویسندگان
چکیده
منابع مشابه
Quantitative Secondary Ion Mass Spectrometry
mental standards, and by statistical and systematic errors in the measurement of x-ray lines and in the separation of line intensity from spectral background. The errors in estimating the characteristics of the detector system, with exception of deadtime effects, cancel when the emission from the specimen is divided by that from the standard. The estimate of achievable accuracy of EPMA and the ...
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ژورنال
عنوان ژورنال: Materia Japan
سال: 1995
ISSN: 1340-2625,1884-5843
DOI: 10.2320/materia.34.826